Park Systems XE-100
Features:
• XY motorized stage 100 µm x 100 µm
• Z-range 12 µm
• XY-resolution: up to 1 nm
• Z-resolution: up to 0.1 nm
Park Systems XE-100
Features:
• XY motorized stage 100 µm x 100 µm
• Z-range 12 µm
• XY-resolution: up to 1 nm
• Z-resolution: up to 0.1 nm